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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10636777 B1

PDFFull Text
Date of Patent:
Apr. 28, 2020

Filed:

Dec. 22, 2017

Infra-red device

Applicant:

Ams Sensors Uk Limited, Cambridge, GB;

Inventors:

Florin Udrea, Cambridge, GB;

Syed Zeeshan Ali, Cambridge, GB;

Richard Henry Hopper, Cambridge, GB;

Rainer Minixhofer, Premstaetten, AT;

Assignee:

AMS SENSORS UK LIMITED, Cambridge, GB;

Attorney:

Tucker Ellis LLP

Primary Examiner:

Laura M Menz

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 25/16 (2006.01); H01L 23/26 (2006.01); H01L 23/48 (2006.01); H01L 35/10 (2006.01); H01L 35/02 (2006.01); H01L 35/32 (2006.01); H01L 35/08 (2006.01); H01L 35/34 (2006.01); H05B 3/36 (2006.01); H01L 23/13 (2006.01); G01J 5/02 (2006.01); G01J 5/08 (2006.01); G01J 5/04 (2006.01); H01L 23/00 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 25/165 (2013.01); G01J 5/024 (2013.01); G01J 5/0225 (2013.01); G01J 5/045 (2013.01); G01J 5/0815 (2013.01); H01L 23/13 (2013.01); H01L 23/26 (2013.01); H01L 23/481 (2013.01); H01L 35/02 (2013.01); H01L 35/08 (2013.01); H01L 35/10 (2013.01); H01L 35/32 (2013.01); H01L 35/34 (2013.01); H05B 3/36 (2013.01); H01L 21/78 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/48 (2013.01); H01L 2224/13025 (2013.01); H01L 2224/4845 (2013.01); H01L 2924/13091 (2013.01);
Abstract

We disclose an Infrared (IR) device comprising a first substrate comprising a first cavity; a dielectric layer disposed on the first substrate; a second substrate disposed on the dielectric layer and on the opposite side of the first substrate, the second substrate having a second cavity. The device further comprises an optically transmissive layer attached to one of the first and second substrates; a further layer provided to another of the first and second substrates so that the IR device is substantially closed. Holes are provided through the dielectric layer so that a pressure in the first cavity is substantially the same level as a pressure in the second cavity.

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