The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Oct. 28, 2016
Applicant:

Sinfonia Technology Co., Ltd., Minato-ku, JP;

Inventors:

Takashi Shigeta, Minato-ku, JP;

Toshihiro Kawai, Minato-ku, JP;

Haruki Takeuchi, Minato-ku, JP;

Yoshimasa Suda, Minato-ku, JP;

Hisashi Gomi, Minato-ku, JP;

Shigenori Ozaki, Nirasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); B65G 49/07 (2006.01); B25J 5/00 (2006.01); B25J 15/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B25J 5/005 (2013.01); B25J 15/00 (2013.01); B65G 49/07 (2013.01); H01L 21/677 (2013.01); H01L 21/67766 (2013.01); H01L 21/68707 (2013.01); B65G 2201/0297 (2013.01);
Abstract

Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space.


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