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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10636629 B1

PDFFull Text
Date of Patent:
Apr. 28, 2020

Filed:

Oct. 05, 2017

Split slit liner door

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Hamid Noorbakhsh, Oakland, CA (US);

Reyn Wakabayashi, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan LLP

Primary Examiner:

Rudy Zervigon

Int. Cl.
CPC ...
C23C 16/54 (2006.01); H01J 37/32 (2006.01); E06B 3/50 (2006.01); E06B 5/00 (2006.01); E05D 15/56 (2006.01); H01L 21/67 (2006.01); E06B 7/23 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32513 (2013.01); E05D 15/56 (2013.01); E06B 3/50 (2013.01); E06B 5/00 (2013.01); E06B 7/23 (2013.01); H01J 37/32082 (2013.01); H01L 21/67126 (2013.01); E05Y 2201/626 (2013.01); E05Y 2900/602 (2013.01); H01L 21/67069 (2013.01);
Abstract

Embodiments disclosed herein generally relate to a substrate processing chamber component assembly with a split slit liner door assembly. In one embodiment, the split slit liner door assembly has a first door portion having a top surface, a rear face and a font face, a RF conductive gasket is disposed on the front face of the first door portion, a second door portion having sides, a bottom and a front surface, the bottom coupled to the actuator, and a linkage assembly coupling the first door portion to the second door portion wherein the linkage assembly is configured to translate a vertical motion of the second door portion relative to a first door portion and a horizontal motion spacing the first door portion from the second door portion.

Find Patent Forward Citations

Noorbakhsh, Hamid. (2020). Split slit liner door (U.S. Patent No. 10636629). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10636629

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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