The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Nov. 17, 2017
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, s-Gravenhage, NL;

Inventors:

Albert Dekker, Delft, NL;

Anton Adriaan Bijnagte, Tricht, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 10/06 (2010.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
G01Q 10/065 (2013.01); H01J 37/20 (2013.01); H01J 2237/20264 (2013.01);
Abstract

A high-precision scanning device () comprises a first linear scanner () for providing scanning movements along a first linear scanning axis (). The first linear scanner comprises a first base frame (), a first scanning frame (), two mutually parallel first piezoelectric bending plates (A,B), and two first hinge joints (A,B) having two first hinge axes (A,B), respectively. Under influence of synchronic piezoelectric operation of the two first piezoelectric bending plates, the first scanning frame is being synchronically moved relative to the first base frame along said first linear scanning axis. The scanning device is compact, especially nearby the working areas where the precise scanning movements have to be performed, so that the device can be operable in very tiny working areas.


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