The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Nov. 24, 2017
Applicant:

Imec Vzw, Leuven, BE;

Inventors:

Abdulkadir Yurt, Heverlee, BE;

Ziduo Lin, Heverlee, BE;

Richard Stahl, Rotselaar, BE;

Geert Vanmeerbeeck, Keerbergen, BE;

Assignee:

IMEC VZW, Leuven, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 9/02 (2006.01); G03H 1/04 (2006.01);
U.S. Cl.
CPC ...
G01J 9/02 (2013.01); G01J 9/0215 (2013.01); G03H 1/0443 (2013.01); G03H 1/0465 (2013.01); G01J 2009/0223 (2013.01); G03H 2001/0447 (2013.01); G03H 2223/12 (2013.01); G03H 2223/19 (2013.01);
Abstract

According to a first aspect, there is provided a method of holographic wavefront sensing, the method including: receiving a light beam, which has a wavefront to be analyzed, on a transparent, flat substrate, which is provided with a lattice of opaque dots, wherein the substrate is arranged above an image sensor; detecting by the image sensor an interference pattern formed by diffracted light, being scattered by the opaque dots, and undiffracted light of the light beam received by the image sensor; processing the detected interference pattern to digitally reconstruct a representation of a displaced lattice of opaque dots, which would form the interference pattern on the image sensor upon receiving the light with a known wavefront; and comparing the representation of the displaced lattice to a known representation of the lattice of opaque dots on the substrate to determine a representation of the wavefront form of the received light beam.


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