The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Jan. 18, 2017
Applicant:

Shimadzu Corporation, Kyoto, JP;

Inventor:

Junichiro Kozaki, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04D 29/058 (2006.01); F04D 29/66 (2006.01); H02N 15/00 (2006.01); B60L 13/04 (2006.01); F16C 32/04 (2006.01);
U.S. Cl.
CPC ...
F04D 19/048 (2013.01); F04D 27/004 (2013.01); F04D 29/058 (2013.01); F04D 29/66 (2013.01); B60L 13/04 (2013.01); F16C 32/044 (2013.01); F16C 32/0448 (2013.01); F16C 2360/46 (2013.01); H02N 15/00 (2013.01);
Abstract

A magnetic bearing vacuum pump comprises: a first displacement signal generation section configured to amplify, by a resolution multiplying factor K of K>1, a displacement modulated wave signal modulated according to a displacement of the rotor from a predetermined position to generate a high-resolution displacement signal in a first displacement region including the predetermined position; a second displacement signal generation section configured to generate a low-resolution displacement signal in a larger second displacement region including the first displacement region; a selection section configured to select either one of the high-resolution displacement signal or the low-resolution displacement signal based on an unsteady-state response signal obtained by excluding a steady-state whirling displacement component from the high-resolution displacement signal or the low-resolution displacement signal; and a bearing control section configured to control the magnetic bearing based on the displacement signal selected by the selection section.


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