The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Mar. 29, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Son T. Nguyen, San Jose, CA (US);
Michael Fong, Mill Valley, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/34 (2006.01); C23C 16/44 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/34 (2013.01); C23C 16/40 (2013.01); C23C 16/4404 (2013.01); C23C 16/4405 (2013.01); C23C 16/50 (2013.01);
Abstract
Embodiments described herein relate to a protective coating that protects an underlying chamber component (i.e. the object upon which the coating is being deposited) from corrosion or deterioration within a corrosive environment.