The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Jun. 28, 2016
Applicant:

Musashino Chemical Laboratory, Ltd., Tokyo, JP;

Inventors:

Masakazu Tsukida, Kitaibaraki, JP;

Hitoshi Takada, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 31/08 (2006.01); B01J 35/10 (2006.01); G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
B01J 31/08 (2013.01); B01J 35/10 (2013.01); G03F 7/0048 (2013.01); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); G03F 7/16 (2013.01); G03F 7/32 (2013.01); G03F 7/40 (2013.01); H01L 21/027 (2013.01);
Abstract

A process for producing an organic acid ester-type liquid is disclosed which is a process for removing an organic peroxide contained in an organic acid ester-type liquid which is a solvent of a resist for producing electronic parts or an organic acid ester-type liquid which is a rinsing liquid for producing electronic parts, which comprises contacting the organic acid ester-type liquid with a platinum group metal catalyst to remove the organic peroxide in the organic acid ester-type liquid, and a resist solvent for producing electronic parts or a rinsing liquid for producing electronic parts which comprises an organic acid ester-type liquid in which an organic peroxide contained therein has been removed by using the producing process and a peroxide value (POV) thereof is 2 mmoL/kg or less.


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