The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

Aug. 29, 2016
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Yu-Wen Hsu, Tainan, TW;

Chung-Yuan Su, Taichung, TW;

Chao-Ta Huang, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/02 (2006.01); H05B 3/26 (2006.01); G05D 23/24 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
H05B 1/023 (2013.01); G01N 27/12 (2013.01); G05D 23/24 (2013.01); H05B 3/265 (2013.01); H05B 2203/003 (2013.01);
Abstract

A micro-electromechanical temperature control system including a micro-electromechanical apparatus is provided. The micro-electromechanical apparatus includes a heater and a thermal reservoir. A specific heat capacity of the thermal reservoir is greater than a specific heat capacity of the heater, so that a heating time and a heating frequency of the heater are reduced to save electrical power consumption. The micro-electromechanical temperature control system is adapted for a micro-electromechanical sensor that is required to be controlled at an operating temperature, such as a gas sensor.


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