The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

Jun. 22, 2017
Applicant:

Wuhan China Star Optoelectronics Technology Co., Ltd., Wuhan, Hubei, CN;

Inventors:

Cunjun Xia, Hubei, CN;

Xin Zou, Wuhan Hubei, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01); C23C 14/56 (2006.01); C23C 14/12 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01); B05C 13/02 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); B05C 13/02 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/50 (2013.01); C23C 14/568 (2013.01); H01L 27/3244 (2013.01); H01L 2227/323 (2013.01);
Abstract

An evaporation equipment includes a main chamber and at least one sub-chamber in communication with the main chamber by a valve. The sub-chamber includes a suction plate, a suction tube, and a fixing part. The suction tube passes through the fixing part and the suction plate. When the evaporation equipment evaporates a material on a depositing substrate, the suction tube adsorbs the depositing substrate to the suction plate, the depositing substrate is aligned with a mask plate, and the depositing substrate is fixed to the mask plate by the fixing part.


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