The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

Aug. 29, 2018
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventor:

Tatsuyoshi Mihara, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 21/28 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01); H01L 29/66 (2006.01); H01L 27/11573 (2017.01); H01L 29/792 (2006.01); H01L 27/1157 (2017.01); H01L 21/8234 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66742 (2013.01); H01L 21/823431 (2013.01); H01L 27/1157 (2013.01); H01L 27/11573 (2013.01); H01L 29/40117 (2019.08); H01L 29/42344 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/66833 (2013.01); H01L 29/792 (2013.01); H01L 29/517 (2013.01);
Abstract

A semiconductor device in which the retention characteristics of a rewritable memory cell packaged together with a field effect transistor including a metal gate electrode are improved and a method for manufacturing the semiconductor device. The semiconductor device includes a field effect transistor with a metal gate electrode and a rewritable memory cell. The manufacturing method includes the step of replacing a dummy gate electrode with the metal gate electrode. Before the step of replacing the dummy gate electrode with the metal gate electrode, the method includes the steps of making the height of the memory cell lower than the height of the dummy gate electrode and forming a protective film for covering the memory cell.


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