The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

Oct. 16, 2018
Applicant:

Sony Corporation, Tokyo, JP;

Inventor:

Masahiro Mitsunaga, Kagoshima, JP;

Assignee:

SONY CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/095 (2006.01); H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 29/205 (2006.01); H01L 41/08 (2006.01); H01L 41/25 (2013.01); H01L 21/28 (2006.01); H01L 21/8252 (2006.01);
U.S. Cl.
CPC ...
H01L 27/095 (2013.01); H01L 21/28 (2013.01); H01L 21/8252 (2013.01); H01L 29/1066 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/778 (2013.01); H01L 29/7781 (2013.01); H01L 29/7785 (2013.01); H01L 29/7786 (2013.01); H01L 41/0815 (2013.01); H01L 41/25 (2013.01);
Abstract

A semiconductor device includes a buffer layer formed with a semiconductor adapted to produce piezoelectric polarization, and a channel layer stacked on the buffer layer, wherein a two-dimensional hole gas, generated in the channel layer by piezoelectric polarization of the buffer layer, is used as a carrier of the channel layer. In a complementary semiconductor device, the semiconductor device described above and an n-type field effect transistor are formed on the same compound semiconductor substrate. Further, a semiconductor device manufacturing method includes forming a compound semiconductor base portion, forming a buffer layer on the base portion, forming a channel layer on the buffer layer, forming a gate on the channel layer, and forming a drain and source with the gate therebetween on the channel layer.


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