The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Dec. 01, 2016
Applicant:
Coldquanta, Inc., Boulder, CO (US);
Inventors:
Steven Michael Hughes, Louisville, CO (US);
Farhad Majdeteimouri, Broomfield, CO (US);
Assignee:
ColdQuanta, Inc., Boulder, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 41/12 (2006.01); G05B 19/048 (2006.01); G05B 19/04 (2006.01);
U.S. Cl.
CPC ...
H01J 41/12 (2013.01); G05B 19/041 (2013.01); G05B 19/048 (2013.01); G05B 2219/41383 (2013.01);
Abstract
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.