The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Mar. 29, 2019
Sifotonics Technologies Co., Ltd., Grand Cayman, KY;
Mengyuan Huang, Redmond, WA (US);
Yadong Liu, Beijing, CN;
Tzung-I Su, Taoyuan, TW;
Pengfei Cai, Beijing, CN;
Ching-yin Hong, Lexington, MA (US);
Dong Pan, Andover, MA (US);
SIFOTONICS TECHNOLOGIES CO., LTD., Grand Cayman, KY;
Abstract
Various embodiments of a monolithic electro-optical (E-O) modulator are described herein. The monolithic E-O modulator may include a phase shifter having a suspended structure. The suspended structure may be realized by partially or completely removing silicon material underneath the active area of the phase shifter to form a void in the bulk silicon substrate supporting the phase shifter. The suspended structure may be utilized to result in a lower radio-frequency loss and an effective group refractive index of the phase shifter that is closer to the refractive index of silicon waveguides or optical fibers, both advantageous to enhancing the performance of the E-O modulator such as a higher operating bandwidth.