Substitution site measuring equipment and substitution site measuring method

Abstract

This substitution site measuring equipment using an electron beam analyzes, with high precision, the structure of a substitution site in a micrometer- to nanometer-order region, by reducing or vanishing the X-ray intensity of diffraction X-rays generated in a specimen. The substitution site measuring equipment measures a substitution site in a crystal by detecting, by means of an X-ray detector, X-rays generated from a specimen upon irradiation of the specimen with an electron beam. The substitution site measuring equipment is provided with: an input unit to which a crystal structure of a specimen, energy or wavelengths of X-rays to be detected, a tilt angle of the specimen, and positional information about the specimen and the X-ray detector are inputted; a diffraction X-ray incidence calculating means for calculating incidence of diffraction X-rays on the X-ray detector on the basis of parameters inputted to the input unit; a measurement condition setting means for setting a measurement condition according to the incidence of diffraction X-rays on the X-ray detector calculated by the diffraction X-ray incidence calculating means such that the diffraction X-rays are not incident on the X-ray detector; and an electron beam inclination/X-ray detection control unit that detects the X-rays in synchronization with the inclination of an electron beam.