The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Apr. 02, 2018
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;
Inventors:
Young-ho Hwang, Hwaseong-si, KR;
Sang-yoon Soh, Yongin-si, KR;
Dae-hee Lee, Seoul, KR;
Dae-sung Jung, Pohang-si, KR;
Dong-ouk Kim, Chuncheon-si, KR;
Jong-min Song, Seoul, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 29/12 (2006.01); G01B 7/00 (2006.01); G01P 15/08 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01B 7/003 (2013.01); G01P 15/0802 (2013.01); G01R 29/12 (2013.01); H01L 21/67259 (2013.01); H01L 21/67173 (2013.01); H01L 21/67253 (2013.01); H01L 2224/16225 (2013.01); H01L 2924/15192 (2013.01);
Abstract
A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit includes a static electricity sensor between the first plate and the second plate.