The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2020

Filed:

May. 30, 2013
Applicant:

Kyocera Corporation, Kyoto-shi, Kyoto, JP;

Inventors:

Keiichi Sekiguchi, Satsumasendai, JP;

Kazuhiko Fujio, Satsumasendai, JP;

Yuusaku Ishimine, Kirishima, JP;

Assignee:

KYOCERA Corporation, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F28F 13/12 (2006.01); F24F 3/12 (2006.01); F28F 13/18 (2006.01); F28F 13/14 (2006.01); F28F 13/02 (2006.01); H01L 21/683 (2006.01); F28D 21/00 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01); F28F 3/12 (2006.01);
U.S. Cl.
CPC ...
F28F 13/12 (2013.01); F28F 3/12 (2013.01); F28F 13/02 (2013.01); F28F 13/14 (2013.01); F28F 13/185 (2013.01); H01J 37/32724 (2013.01); H01L 21/6833 (2013.01); H01L 21/68785 (2013.01); F28D 2021/0029 (2013.01); F28F 2215/04 (2013.01); H01L 21/67103 (2013.01); Y10T 137/2087 (2015.04);
Abstract

A flow path member includes a lid portion, a bottom plate portion, and side walls provided between the lid portion and the bottom plate portion, a flow path in which a fluid flows is configured with the lid portion, the side walls, and the bottom plate portion, a portion of a surface of the side walls on the flow path side includes a coarse portion that is coarser than the other portions.


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