The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Apr. 04, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Matthew C. Traub, Austin, TX (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, unknown;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 3/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00373 (2013.01); B81B 3/0089 (2013.01); G03F 7/0002 (2013.01); B81B 2201/057 (2013.01); B81C 2201/016 (2013.01); B81C 2201/0133 (2013.01); B81C 2201/0188 (2013.01);
Abstract
A photo-patterned fluorocarbon monolayer directly grafted to Si surface atoms provides anti-wetting performance at controlled locations, wherein the Si surface oxide is etched and reacted with fluorocarbon chains with a terminal C—C double bond, resulting in Si—C surface. As the direct Si—C linkages are chemically robust, and much more resistant to decomposition than Si—O—C bonds, the resulting surface does not suffer from the shortcomings of current MEMS dispensers.