The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Jun. 15, 2016
Edwards Limited, Burgess Hill, West Sussex, GB;
Christopher Mark Bailey, Burgess Hill, GB;
Clive Marcus Lloyd Tunna, Bolney, GB;
Jack Raymond Tattersall, Victoria, AU;
Ingo Stephen Graham, Burgess Hill, GB;
Michael Roger Czerniak, Clevedon, GB;
Gary Peter Knight, Clevedon, GB;
Darren Mennie, Portishead, GB;
Duncan Michael Price, Clevedon, GB;
Derek Martin Baker, Clevedon, GB;
Andrew James Seeley, Clevedon, GB;
Edwards Limited, Burgess Hill, West Sussex, GB;
Abstract
Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.