The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Jul. 28, 2016
Applicant:
Epcos Ag, München, DE;
Inventors:
Michael Weilguni, Hagenberg, AT;
Markus Puff, Graz, AT;
Assignee:
EPCOS AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01H 1/24 (2006.01); H05H 1/24 (2006.01); C02F 1/30 (2006.01); H01L 41/04 (2006.01); H01L 41/107 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2475 (2013.01); C02F 1/30 (2013.01); H01L 41/044 (2013.01); H01L 41/107 (2013.01); H05H 2001/2481 (2013.01);
Abstract
A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.