The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Oct. 30, 2018
Qorvo Us, Inc., Greensboro, NC (US);
George Maxim, Saratoga, CA (US);
Dirk Robert Walter Leipold, San Jose, CA (US);
Julio C. Costa, Oak Ridge, NC (US);
Baker Scott, San Jose, CA (US);
Danny W. Chang, San Francisco, CA (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
The present disclosure relates to a transmission line structure embedded in a back-end-of-line (BEOL) body that has a cavity. The transmission line structure includes a signal transmission line, a ground plane and a shielding line. The signal transmission line and the first shielding line are formed on a same metallization level, and the ground plane is formed underneath and electrically connected to the first shielding line. A side surface of the signal transmission line and a side surface of the first shielding line, which faces the side surface of the signal transmission line, are exposed to the cavity of the BEOL body, and not covered by any high resistivity conductive coating.