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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10622254 B1

PDFFull Text
Date of Patent:
Apr. 14, 2020

Filed:

Jul. 19, 2016

Laser working method, laser working apparatus, and its manufacturing method

Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Makoto Nakano, Hamamatsu, JP;

Koji Kuno, Hamamatsu, JP;

Tetsuya Osajima, Hamamatsu, JP;

Takashi Inoue, Hamamatsu, JP;

Masayoshi Kumagai, Tokyo, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:

Faegre Drinker Biddle & Reath LLP

Primary Examiner:

Shaun M Campbell

Int. Cl.
CPC ...
H01L 21/78 (2006.01); B23K 26/046 (2014.01); B23K 26/08 (2014.01); B23K 26/12 (2014.01); B28D 1/22 (2006.01); B28D 5/00 (2006.01); B23K 26/064 (2014.01); B23K 26/0622 (2014.01); B23K 26/40 (2014.01); C03B 33/02 (2006.01); B23K 26/53 (2014.01); B23K 26/00 (2014.01); H01L 23/544 (2006.01); B23K 26/402 (2014.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 26/0006 (2013.01); B23K 26/046 (2013.01); B23K 26/064 (2015.10); B23K 26/0624 (2015.10); B23K 26/0861 (2013.01); B23K 26/128 (2013.01); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B28D 1/221 (2013.01); B28D 5/00 (2013.01); C03B 33/0222 (2013.01); H01L 23/544 (2013.01); B23K 26/402 (2013.01); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); H01L 2223/54453 (2013.01); Y10T 29/49826 (2015.01);
Abstract

An object is irradiated with a laser light modulated by a reflection type spatial light modulator such that aberration of the laser light converged inside the object becomes a predetermined aberration or less. Therefore, aberration of the laser light generated at a position on which a converging point of the laser light is located is made as small as possible, to enhance the energy density of the laser light at that position, which makes it possible to form a modified region with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator is used, it is possible to improve the utilization efficiency of the laser light as compared with a transmissive type spatial light modulator.

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