The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Oct. 30, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Roey Shaviv, Palo Alto, CA (US);
Ismail T. Emesh, Sunnyvale, CA (US);
Assignee:
APPLIED Materials, Inc., Santa Clara, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/532 (2006.01); H01L 21/288 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76879 (2013.01); H01L 21/76843 (2013.01); H01L 21/76862 (2013.01); H01L 21/76864 (2013.01); H01L 21/76873 (2013.01); H01L 21/76877 (2013.01); H01L 21/76883 (2013.01); H01L 23/53209 (2013.01); H01L 23/53238 (2013.01); H01L 21/2885 (2013.01);
Abstract
In one embodiment of the present disclosure, a microfeature workpiece includes at least two features of two different sizes disposed in a dielectric, wherein a width of a first feature is less than or equal to 17 nm and wherein the first feature is filled with cobalt or nickel, and wherein a width of a second feature is greater than 20 nm and wherein the second feature is filled with a stack layer of cobalt or nickel and copper.