The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Aug. 30, 2019
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
An optical inspection apparatus includes an imaging optical system facing an inspection target, a light guide, a plurality of light sources, and a plurality of mirror surfaces. The light guide has a plurality of corner portions and extending along an optical axis of the imaging optical system. The plurality of light sources face a first end face of the light guide at positions corresponding to the plurality of corner portions. The plurality of mirror surfaces are respectively provided on second end faces of the light guide. Each of the mirror surfaces is oblique relative to the optical axis. The mirror surfaces are configured to reflect light entered into the light guide from the light sources toward the inspection target.