The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Apr. 12, 2017
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventor:
Shunsuke Akasaka, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/407 (2006.01); G01N 27/419 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4074 (2013.01); G01N 27/407 (2013.01); G01N 27/419 (2013.01); G01N 33/0006 (2013.01); G01N 33/0037 (2013.01); G01N 27/4071 (2013.01); Y02A 50/245 (2018.01);
Abstract
A nitrogen oxide based gas sensor includes: a substrate provided with a beam structure having a MEMS structure; a heater disposed on the substrate; a lower electrode disposed on the heater, a solid electrolyte layer disposed on the lower electrode; an upper electrode disposed on a surface of the solid electrolyte layer facing the lower electrode and configured to introduce a measurement target gas; a cavity portion formed in the substrate; and a gas flow path disposed so as to connect the cavity portion and the lower electrode, wherein the gas sensor is configured to detect a concentration of nitrogen oxide in the measurement target gas.