The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Jun. 12, 2019
Applicant:
Vistadeltek, Llc, Yorba Linda, CA (US);
Inventor:
Kim Ngoc Vu, Yorba Linda, CA (US);
Assignee:
VistadelTek, LLC, Yorba Linda, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 1/36 (2006.01); F16K 27/02 (2006.01); F16K 41/12 (2006.01); F16K 1/42 (2006.01);
U.S. Cl.
CPC ...
F16K 1/36 (2013.01); F16K 1/42 (2013.01); F16K 27/02 (2013.01); F16K 41/12 (2013.01);
Abstract
A high purity fluid control valve includes a moveable control plate having a flow-through passage to enhance fluid sweep of the internal valve volume. The valve is of jet and seat type using nested orifice ridges to achieve high conductance with small actuator movement. The flow-through control plate is especially useful in fast acting proportional control applications such as gas delivery in semiconductor manufacturing.