The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Mar. 16, 2016
Applicant:
Microchem Inc., Eumseong-gun, Chungcheongbuk-do, KR;
Inventors:
Sam Keun Lee, Daejeon, KR;
Jong Taik Lee, Yongin-si, KR;
Jun Young Lee, Chungcheongbuk-do, KR;
Ho Seob Kim, Seoul, KR;
Assignee:
MICROCHEM INC., Eumseong-gun, KR;
Primary Examiner:
Int. Cl.
CPC ...
C07F 11/00 (2006.01); C23C 16/06 (2006.01); C07F 17/00 (2006.01); C23C 16/455 (2006.01); C09D 1/00 (2006.01);
U.S. Cl.
CPC ...
C07F 17/00 (2013.01); C07F 11/00 (2013.01); C09D 1/00 (2013.01); C23C 16/06 (2013.01); C23C 16/45525 (2013.01); C23C 16/45553 (2013.01);
Abstract
Provided are a tungsten precursor compound to which a substituent is bonded so as to obtain thermal stability and a method of forming a tungsten-containing film using the precursor.