The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2020

Filed:

Nov. 05, 2015
Applicant:

Edwards Japan Limited, Yachiyo-shi, Chiba, JP;

Inventors:

Toshiki Yamada, Yachiyo, JP;

Alexander Michael Pope, Clevedon, GB;

Alistair Bennett, Clevedon, GB;

Steven Barlow, Clevedon, GB;

Christopher Peter Jones, Clevedon, GB;

Assignee:

Edwards Japan Limited, Yachiyo-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/96 (2006.01); B01D 53/68 (2006.01); B01D 21/26 (2006.01); B01D 53/40 (2006.01); H01L 21/31 (2006.01); B01D 53/78 (2006.01); B01D 47/14 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01); B01D 53/34 (2006.01);
U.S. Cl.
CPC ...
B01D 53/96 (2013.01); B01D 21/26 (2013.01); B01D 21/267 (2013.01); B01D 47/14 (2013.01); B01D 53/40 (2013.01); B01D 53/68 (2013.01); B01D 53/78 (2013.01); C23C 16/4412 (2013.01); C23C 16/52 (2013.01); H01L 21/31 (2013.01); B01D 53/346 (2013.01); B01D 2252/103 (2013.01); B01D 2257/2047 (2013.01); B01D 2257/553 (2013.01); B01D 2258/0216 (2013.01); Y02C 20/30 (2013.01);
Abstract

Provided is an abatement device that reduces an amount of drainage of circulating water. The abatement device lowers an average drainage flow of circulating water to a low flow, when a ratio of a concentration of silicon dioxide within the circulating water and a concentration of hydrogen fluoride within the circulating water is greater than or equal to a predetermined value at which hydrofluorosilicic acid can be produced, and raises the average drainage flow of the circulating water to a high flow higher than the low flow, when the ratio of the concentration of silicon dioxide within the circulating water and the concentration of hydrogen fluoride within the circulating water is less than the predetermined value.


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