The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Jul. 26, 2016
Applicant:

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Koshi Nishida, Osaka, JP;

Kozo Yano, Osaka, JP;

Katsuhiko Kishimoto, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C23C 14/24 (2006.01); H05B 33/10 (2006.01); C23C 14/04 (2006.01); H01L 51/50 (2006.01); H01L 51/52 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); H01L 51/5056 (2013.01); H01L 51/5072 (2013.01); H01L 51/5092 (2013.01); H01L 51/5206 (2013.01); H01L 51/5221 (2013.01); H01L 51/56 (2013.01); H05B 33/10 (2013.01);
Abstract

A vapor deposition mask used for forming a thin film pattern on a substrate enables to form much higher-definition thin film pattern and to closely attract and hold the vapor deposition mask to and on a surface of a transparent substrate by a magnetic force in a state that the substrate held on a substrate holder is intermediated therebetween, while preventing occurrence of shadow portions (vapor deposition shadows) to which no deposition material is adhered due to a holding member. A vapor deposition maskis composed of a single resin film layeror a resin film layerand a holding memberof a substantially rectangular thin plate frame body, and a metal powderis contained in the resin film layerin which a plurality of through openingsare formed. When having the holding member, a single rectangular openingincluding a portion of the resin film layerwhere a plurality of the through openingsare formed is formed on the holding member


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