The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Mar. 27, 2018
Applicant:
Ablic Inc., Chiba-shi, Chiba, JP;
Inventor:
Yuichiro Kitajima, Chiba, JP;
Assignee:
ABLIC INC., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/525 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5258 (2013.01);
Abstract
Provided is a semiconductor device including a fuse element arranged on an interlayer insulating film formed on a semiconductor substrate. The fuse element is formed of polysilicon and a silicide region arranged on an upper surface of the polysilicon. A region of the polysilicon included in a range to be irradiated with a laser beam in plan view is non-doped polysilicon into which impurities are not introduced. With this structure, it is possible to provide the semiconductor device including the fuse element, which can be stably cut with a laser beam while an underlying film is not damaged.