The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Aug. 29, 2018
Applicant:

Tasmit, Inc., Yokohama, JP;

Inventor:

Shinichi Nakazawa, Yokohama, JP;

Assignee:

TASMIT, INC., Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G06T 5/50 (2006.01); G01B 11/27 (2006.01); H01J 37/28 (2006.01); G01B 21/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/263 (2013.01); G01B 11/272 (2013.01); G01B 21/045 (2013.01); G06T 5/50 (2013.01); H01J 37/28 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2809 (2013.01); H01J 2237/2817 (2013.01);
Abstract

A method which can generate a clear image of a specimen by correcting an image drift is disclosed. The image generation method includes: scanning a specimen with an electron beam to generate images; calculating amounts of image drift within specific regions of the respective images; calculating continuous amounts of image drift by interpolation from the amounts of image drift; determining an amount of image drift at each pixel of the images from the continuous amounts of image drift; correcting the images by correcting a brightness of each pixel based on the amount of image drift at each pixel; and generating a synthetic image from the corrected images.


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