The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Jul. 13, 2016
Applicant:

National University Corporation Nara Institute of Science and Technology, Nara, JP;

Inventors:

Fumihiko Matsui, Nara, JP;

Hiroyuki Matsuda, Nara, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 49/44 (2006.01); H01J 37/075 (2006.01); H01J 37/09 (2006.01); H01J 37/12 (2006.01); H01J 37/244 (2006.01); H01J 37/252 (2006.01); H01J 37/305 (2006.01); G01N 23/227 (2018.01); H01J 49/48 (2006.01); H01J 49/06 (2006.01); H01J 43/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); G01N 23/227 (2013.01); H01J 37/075 (2013.01); H01J 37/09 (2013.01); H01J 37/12 (2013.01); H01J 37/244 (2013.01); H01J 37/252 (2013.01); H01J 37/305 (2013.01); H01J 43/24 (2013.01); H01J 49/06 (2013.01); H01J 49/488 (2013.01);
Abstract

Provided is a compact device which captures, over a large solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (-) and an axisymmetric aspherical mesh () which has a surface that is concave away from the point source; and a flat collimator plate () positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source () is ±30° or greater. The shape of the aspherical mesh (), and the potentials and the positions of a ground electrode () and application electrodes (-) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis.


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