The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Apr. 28, 2015
Applicant:

Screen Holdings Co., Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Yasushi Nagata, Kyoto, JP;

Yasushi Sasa, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/956 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 21/88 (2013.01); G01N 21/956 (2013.01); G01N 21/95607 (2013.01); G01N 21/95684 (2013.01); G06T 7/001 (2013.01); G01N 2021/8864 (2013.01); G01N 2021/8887 (2013.01); G06T 7/0002 (2013.01);
Abstract

In a first defect candidate area detected on the basis of a difference between a value of each pixel in a picked-up image and a value of a corresponding pixel in a reference image and a second defect candidate area detected on the basis of a ratio between a value of each pixel in the picked-up image and a value of a corresponding pixel in the reference image, an overlapping area is detected as a defect area. It is thereby possible to suppress detection of a false defect and detect a defect with high accuracy. In a preferable defect detection part, a shaking comparison part detects a defect candidate area on the basis of a difference in the pixel value between the picked-up image and the reference image, and a false information reducing part limits pixels to be used for obtaining the above ratio to those included in the defect candidate area.


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