The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2020

Filed:

Aug. 01, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Phaedon Avouris, Yorktown Heights, NY (US);

Damon B. Farmer, White Plains, NY (US);

Yilei Li, New York, NY (US);

Hugen Yan, Ossining, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/552 (2014.01); H01L 21/04 (2006.01); H01L 21/56 (2006.01); H01L 21/02 (2006.01); H01L 21/31 (2006.01); H01L 29/16 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
G01N 21/554 (2013.01); H01L 21/0277 (2013.01); H01L 21/02422 (2013.01); H01L 21/02527 (2013.01); H01L 21/041 (2013.01); H01L 21/042 (2013.01); H01L 21/31 (2013.01); H01L 21/31144 (2013.01); H01L 21/56 (2013.01); H01L 29/1606 (2013.01);
Abstract

Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.


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