The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Mar. 12, 2018
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventor:
Naotada Okada, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
F26B 7/00 (2006.01); G02B 27/14 (2006.01); G02B 27/09 (2006.01); F26B 3/28 (2006.01); F26B 5/12 (2006.01); G02B 19/00 (2006.01); G02B 27/10 (2006.01); G02B 27/30 (2006.01); H01S 3/11 (2006.01); H01S 3/16 (2006.01);
U.S. Cl.
CPC ...
F26B 7/00 (2013.01); F26B 3/28 (2013.01); F26B 5/12 (2013.01); G02B 19/0047 (2013.01); G02B 27/0905 (2013.01); G02B 27/0961 (2013.01); G02B 27/0994 (2013.01); G02B 27/10 (2013.01); G02B 27/145 (2013.01); G02B 27/30 (2013.01); H01S 3/11 (2013.01); H01S 3/1643 (2013.01);
Abstract
A liquid removal apparatus is configured to remove a liquid by irradiating a laser beam on the liquid. The liquid is adhered to a surface of a member. The apparatus includes a laser light source, and an energy controller. The energy controller is configured to unevenly distribute an energy intensity at an irradiation surface by splitting, into a plurality of laser beams, a laser beam emitted from the laser light source and by overlaying a portion of the split plurality of laser beams at an irradiation position where the liquid is adhered.