The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Jan. 27, 2017
Applied Materials, Inc., Santa Clara, CA (US);
Chengtsin Lee, Union City, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An article comprises a body and at least one final plasma resistant coating layer on at least one surface of the body. The at least one final plasma resistant coating layer is a mixture of a ScFand an initial plasma resistant coating material selected from the group consisting of YF, YO, a compound of YAlO, a solid-solution of YO—ZrO, CaF, MgF, SrF, AlF, ErF, LaF, NdF, ScF, CeF, ZrF, and combinations thereof. The at least one final plasma resistant coating layer has a thermal expansion coefficient that is within about 20% of the thermal expansion coefficient of the body.