The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Sep. 11, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 41/09 (2006.01); B06B 1/06 (2006.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B06B 1/0644 (2013.01); H01L 41/0815 (2013.01); H01L 41/0973 (2013.01); B41J 2002/14419 (2013.01); B41J 2202/03 (2013.01); B41J 2202/11 (2013.01); H01L 41/1132 (2013.01);
Abstract
A liquid discharge head includes a pressure chamber that accommodates a liquid, a diaphragm that forms a wall surface of the pressure chamber, and a piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm. The diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride.