The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Jun. 13, 2016
Applicant:
Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Tatsuo Tsubaki, Ise, JP;
Masanao Murata, Ise, JP;
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 5/02 (2006.01); H01L 21/673 (2006.01); B65G 1/00 (2006.01); H01L 21/677 (2006.01); B08B 9/08 (2006.01);
U.S. Cl.
CPC ...
B08B 5/02 (2013.01); B08B 9/0826 (2013.01); B65G 1/00 (2013.01); H01L 21/673 (2013.01); H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67733 (2013.01); H01L 21/67769 (2013.01);
Abstract
A purge device is capable of removing particles adhering to a gas introduction port in a container or on surrounding areas of a purge nozzle. The purge device includes a nozzle that is able to blow a gas, and a purge controller that controls the nozzle to blow the gas therethrough in a state in which a bottom surface of a container to be purged faces the nozzle.