The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Jul. 05, 2017
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventors:
Kansho Yamamoto, Nagaokakyo, JP;
Takuo Hada, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01); H01L 41/29 (2013.01); H01L 41/253 (2013.01); H01L 41/113 (2006.01); H01L 41/39 (2013.01); H01L 41/09 (2006.01); H03H 3/02 (2006.01); H01L 41/23 (2013.01); H03H 9/58 (2006.01); H03H 9/17 (2006.01); H05B 3/26 (2006.01); H01L 41/08 (2006.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H05B 3/03 (2006.01); H03H 9/02 (2006.01); H03H 3/04 (2006.01); H01L 41/314 (2013.01);
U.S. Cl.
CPC ...
H01L 41/29 (2013.01); H01L 41/0805 (2013.01); H01L 41/09 (2013.01); H01L 41/113 (2013.01); H01L 41/23 (2013.01); H01L 41/253 (2013.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H01L 41/39 (2013.01); H03H 3/02 (2013.01); H03H 9/174 (2013.01); H03H 9/583 (2013.01); H05B 3/03 (2013.01); H05B 3/26 (2013.01); H01L 41/314 (2013.01); H03H 2003/0414 (2013.01); H03H 2009/02181 (2013.01);
Abstract
A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.