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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10608166 B1

PDFFull Text
Date of Patent:
Mar. 31, 2020

Filed:

Jul. 05, 2017

Method for manufacturing a piezoelectric device

Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Kansho Yamamoto, Nagaokakyo, JP;

Takuo Hada, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:

Arent Fox LLP

Primary Examiner:

Paul D Kim

Int. Cl.
CPC ...
H04R 17/00 (2006.01); H01L 41/29 (2013.01); H01L 41/253 (2013.01); H01L 41/113 (2006.01); H01L 41/39 (2013.01); H01L 41/09 (2006.01); H03H 3/02 (2006.01); H01L 41/23 (2013.01); H03H 9/58 (2006.01); H03H 9/17 (2006.01); H05B 3/26 (2006.01); H01L 41/08 (2006.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H05B 3/03 (2006.01); H03H 9/02 (2006.01); H03H 3/04 (2006.01); H01L 41/314 (2013.01);
U.S. Cl.
CPC ...
H01L 41/29 (2013.01); H01L 41/0805 (2013.01); H01L 41/09 (2013.01); H01L 41/113 (2013.01); H01L 41/23 (2013.01); H01L 41/253 (2013.01); H01L 41/332 (2013.01); H01L 41/338 (2013.01); H01L 41/39 (2013.01); H03H 3/02 (2013.01); H03H 9/174 (2013.01); H03H 9/583 (2013.01); H05B 3/03 (2013.01); H05B 3/26 (2013.01); H01L 41/314 (2013.01); H03H 2003/0414 (2013.01); H03H 2009/02181 (2013.01);
Abstract

A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

Find Patent Forward Citations

Yamamoto, Kansho. (2020). Method for manufacturing a piezoelectric device (U.S. Patent No. 10608166). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10608166

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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