The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Dec. 18, 2018
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Tomohiro Sakai, Matsumoto, JP;

Koichi Morozumi, Shiojiri, JP;

Kazuya Kitada, Suwa, JP;

Harunobu Koike, Matsumoto, JP;

Koji Sumi, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/09 (2006.01); H01L 41/318 (2013.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); B41J 2/14233 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/318 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14362 (2013.01); B41J 2002/14419 (2013.01); B41J 2002/14491 (2013.01); B41J 2202/03 (2013.01);
Abstract

Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode, containing potassium, sodium, and niobium, and having a perovskite structure, and a second electrode provided above the piezoelectric layer. In a case where the piezoelectric layer is divided into two portions at a center thereof in a thickness direction, the piezoelectric layer includes a first portion on the first electrode side and a second portion on the second electrode side. The piezoelectric layer includes line defects. A density of the line defects in the second portion is higher than a density of the line defects in the first portion.


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