The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

May. 09, 2016
Applicants:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

National Institute of Advanced Industrial Science and Technology, Chiyoda-ku, Tokyo, JP;

Inventors:

Keiichi Umeda, Nagaokakyo, JP;

Atsushi Honda, Nagaokakyo, JP;

Morito Akiyama, Tosu, JP;

Keiko Nishikubo, Tosu, JP;

Toshimi Nagase, Tosu, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H04R 17/02 (2006.01); H03H 9/17 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01); H03H 3/02 (2006.01); C23C 16/34 (2006.01); C23C 14/00 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
H01L 41/183 (2013.01); C23C 14/0036 (2013.01); C23C 14/3414 (2013.01); C23C 14/3464 (2013.01); C23C 16/34 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); H03H 3/02 (2013.01); H03H 9/17 (2013.01); H04R 17/02 (2013.01); H04R 2307/027 (2013.01);
Abstract

A piezoelectric thin film composed of aluminum nitride and which contains magnesium and 31 to 120 atomic percent of niobium relative to 100 atomic percent of the magnesium, and the total content of the magnesium and the niobium relative to the total sum of contents of the magnesium, the niobium and the aluminum nitride falls within the range of 10 to 67 atomic percent.


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