The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Oct. 18, 2017
Applicant:
Vega Grieshaber KG, Wolfach, DE;
Inventors:
Dominik Fehrenbach, Haslach, DE;
Volker Allgaier, Haslach, DE;
Assignee:
Vega Grieshaber KG, Wolfach, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); G01H 11/08 (2006.01); G01K 7/34 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H01L 41/042 (2013.01); G01H 11/08 (2013.01); G01K 7/34 (2013.01); H01L 41/1132 (2013.01);
Abstract
A vibration sensor with a diaphragm that can be set into vibration, a piezo-electric drive for setting the diaphragm into vibration and for detecting vibrations in the diaphragm, with the drive having at least two serial mechanical piezo elements, a temperature sensor, with at least a first piezo element made from a first piezo-electric material and at least a second piezo element made from a second piezo-electric material.