The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Feb. 27, 2017
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Mitsuhiko Sakai, Osaka, JP;

Toru Hiyoshi, Osaka, JP;

So Tanaka, Osaka, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/16 (2006.01); H01L 29/872 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); H01L 29/47 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7813 (2013.01); H01L 29/0615 (2013.01); H01L 29/0619 (2013.01); H01L 29/0623 (2013.01); H01L 29/12 (2013.01); H01L 29/1608 (2013.01); H01L 29/78 (2013.01); H01L 29/872 (2013.01); H01L 29/045 (2013.01); H01L 29/47 (2013.01);
Abstract

A silicon carbide substrate includes a first impurity region, a second impurity region in contact with the first impurity region and having p type, a third impurity region on the first impurity region and the second impurity region and having n type, a body region, and a source region. A gate insulating film is in contact with the source region, the body region and the third impurity region at a side surface, and in contact with the third impurity region at a bottom surface. When viewed in a direction perpendicular to a main surface, the second impurity region contains the bottom surface, and an area of the second impurity region is greater than an area of the bottom surface, and is not more than three times the area of the bottom surface. An impurity concentration of the second impurity region exceeds 1×10cm, and is not more than 1×10cm.


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