The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Nov. 25, 2016
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventor:

Johan Rothman, Grenoble, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 31/103 (2006.01); H01L 31/0296 (2006.01); H01L 31/18 (2006.01); H01L 31/0224 (2006.01); H01L 31/02 (2006.01); H01L 31/0216 (2014.01); H01L 31/0352 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14649 (2013.01); H01L 27/14685 (2013.01); H01L 27/14689 (2013.01); H01L 31/02005 (2013.01); H01L 31/02161 (2013.01); H01L 31/02963 (2013.01); H01L 31/02966 (2013.01); H01L 31/022408 (2013.01); H01L 31/035272 (2013.01); H01L 31/1032 (2013.01); H01L 31/1832 (2013.01); H01L 31/1864 (2013.01); H01L 31/1868 (2013.01);
Abstract

A photodetection device and a method for manufacturing the device, the device including a substrate and an array of diodes, the substrate including an absorption layer including a first type of doping, and each diode including, in the absorption layer, a collection region including a second type of doping opposite to the first type. The device further includes, under the surface of the substrate, a conductive mesh including at least one conductive channel inserted between the collection regions of two adjacent diodes, the at least one conductive channel including the first type of doping and a higher doping density than the absorption layer. The doping density of the at least one conductive channel is the result of a diffusion of metal in the absorption layer from a metal mesh provided on the surface of the substrate.


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