The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Mar. 20, 2018
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Takeshi Harada, Toyama, JP;
Koji Utaka, Toyama, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/45 (2006.01); H01L 21/28 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/32 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 29/778 (2006.01); H01L 21/285 (2006.01); H01L 27/098 (2006.01); H01L 29/808 (2006.01); H01L 29/812 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28 (2013.01); H01L 21/28575 (2013.01); H01L 27/098 (2013.01); H01L 29/0684 (2013.01); H01L 29/1066 (2013.01); H01L 29/32 (2013.01); H01L 29/417 (2013.01); H01L 29/423 (2013.01); H01L 29/452 (2013.01); H01L 29/49 (2013.01); H01L 29/66462 (2013.01); H01L 29/778 (2013.01); H01L 29/7786 (2013.01); H01L 29/808 (2013.01); H01L 29/812 (2013.01); H01L 29/2003 (2013.01);
Abstract
A semiconductor device includes: a substrate; a p-type GaN layer that is formed above the substrate, and includes GaN containing p-type impurities; and a Ti film formed on a surface of the p-type GaN layer. The Ti film includes a Ti film containing no nitrogen and a nitrogen-containing Ti film that is less chemically active than such Ti film. The nitrogen-containing Ti film continuously surrounds an outer periphery of the Ti film containing no nitrogen in a planar view.