The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
Dec. 29, 2017
The United States of America As Represented BY the Secretary of the Navy, Indian Head, MD (US);
Dan Jean, Odenton, MD (US);
Scott Rauscher, Washington, DC (US);
Andrew Jen, Alexandria, VA (US);
Muhammad Khan, Silver Spring, MD (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A MEMS unpowered pressure sensor device including a substrate, a flexible membrane operatively connected to the substrate, and a cantilever beam operatively connected to the substrate and suspended over the flexible membrane. The flexible membrane is configured to deform towards the cantilever beam upon pressure applied such that the deformed flexible membrane makes contact with the cantilever beam. The device may include a plurality of bond pads arranged around the flexible membrane. Each of the plurality of bond pads may include its own cantilever beam forming an array of a plurality of cantilever beams. The plurality of cantilever beams includes beams of different lengths. The device may include at least one bond pad on the substrate and over the flexible membrane. The cantilever beam may extend from at least one bond pad. The flexible membrane may deform in a substantially dome shape.