The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10605665 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 31, 2020

Filed:

Oct. 31, 2017
Applicants:

National Cheng Kung University, Tainan, TW;

National Chung-shan Institute of Science & Technology, Taoyuan, TW;

Inventors:

Yu-Lung Lo, Tainan, TW;

Chi-Guang Ren, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2006.01); G01J 5/10 (2006.01); G01J 5/60 (2006.01); B29C 64/386 (2017.01); G01J 5/52 (2006.01); G01J 5/08 (2006.01); B29C 64/393 (2017.01); B33Y 50/02 (2015.01); B33Y 10/00 (2015.01); B29C 64/153 (2017.01);
U.S. Cl.
CPC ...
G01J 5/0003 (2013.01); B29C 64/386 (2017.08); B29C 64/393 (2017.08); B33Y 10/00 (2014.12); B33Y 50/02 (2014.12); G01J 5/08 (2013.01); G01J 5/10 (2013.01); G01J 5/522 (2013.01); G01J 5/60 (2013.01); B29C 64/153 (2017.08);
Abstract

A method for measuring a temperature of a process area is provided. A simulation computation is performed to obtain a simulation temperature. A ratio-pyrometer with two one-color modes is used to measure the temperature of the process area, and a first emissivity value and a second emissivity value are acquired. An emissivity ratio is set to a ratio of the second emissivity value to the first emissivity value, and the ratio-pyrometer in the two-color mode is used to measure the temperature of the process area.


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