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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10605530 B1

PDFFull Text
Date of Patent:
Mar. 31, 2020

Filed:

Jul. 26, 2017

Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Lucian C. Jdira, Nieuw Vennep, NL;

Chris G. M. de Ridder, Almere, NL;

Theodorus G. M. Oosterlaken, Oudewater, NL;

Klaas P. Boonstra, Almere, NL;

Herbert Terhorst, Almere, NL;

Juul Keijser, Almere, NL;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Gregory A Wilson

Int. Cl.
CPC ...
F27D 7/06 (2006.01); F27B 5/04 (2006.01); F27B 1/14 (2006.01); F27B 1/28 (2006.01); F27B 5/08 (2006.01); F27B 5/12 (2006.01); F27B 5/16 (2006.01); F27D 3/00 (2006.01); F27D 11/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F27B 5/04 (2013.01); F27B 1/14 (2013.01); F27B 1/28 (2013.01); F27B 5/08 (2013.01); F27B 5/12 (2013.01); F27B 5/16 (2013.01); F27D 3/0084 (2013.01); F27D 11/00 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); F27B 2005/162 (2013.01); H01L 21/67248 (2013.01);
Abstract

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

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