The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2020
Filed:
May. 13, 2016
Materion Corporation, Mayfield Heights, OH (US);
Longzhou Ma, Las Vegas, NV (US);
Xingbo Yang, Phoenix, AZ (US);
Dejan Stojakovic, Danbury, CT (US);
Arthur V. Testanero, New Fairfield, CT (US);
Matthew J. Komertz, New Fairfield, CT (US);
MATERION CORPORATION, Mayfield Heights, OH (US);
Abstract
Methods for finishing a sputtering target to reduce particulation and to reduce burn-in time are disclosed. The surface of the unfinished sputtering target is blasted with beads to remove machining-induced defects. Additional post-processing steps include dust blowing-off, surface wiping, dry ice blasting, removing moisture using hot air gun, and annealing, resulting in a homogeneous, ultra-clean, residual-stress-free, hydrocarbon chemicals-free surface.