The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2020

Filed:

Jun. 21, 2017
Applicant:

Oerlikon Surface Solutions Ag, Pfaffikon, Pfaffikon, CH;

Inventors:

Juergen Ramm, Maienfeld, CH;

Beno Widrig, Bad Ragaz, CH;

Richard Rachbauer, Feldkirch, AT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/22 (2006.01); H01J 37/32 (2006.01); C23C 14/56 (2006.01); C23C 14/32 (2006.01); C23C 14/06 (2006.01); C23C 14/14 (2006.01); H01M 4/02 (2006.01);
U.S. Cl.
CPC ...
C23C 14/22 (2013.01); C23C 14/0605 (2013.01); C23C 14/067 (2013.01); C23C 14/0641 (2013.01); C23C 14/14 (2013.01); C23C 14/325 (2013.01); C23C 14/564 (2013.01); H01J 37/32055 (2013.01); H01J 37/32422 (2013.01); H01J 37/32614 (2013.01); H01J 37/32853 (2013.01); H01J 37/32871 (2013.01); H01J 37/34 (2013.01); H01M 4/02 (2013.01); H01M 2004/028 (2013.01);
Abstract

A macroparticle filter device for cathodic arc evaporation, to be placed between at least one arc evaporation source and at least one substrate exhibiting at least a surface to be coated with material evaporated from a cathode of the arc evaporation source in a vacuum coating chamber. The macroparticle filter device includes one or more filter components that can prevent macroparticles emitted by the cathode during cathodic arc evaporation to arrive the substrate surface to be coated. The at least one component is provided as one or more flexible sheets that block the lineal way of the macroparticles from the cathode to the substrate surface to be coated. Further a method for utilizing the macroparticle filter device is presented.


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